Canyon Materials, Inc. - Technology
CMI Technology
High Energy Beam Sensitive (HEBS) Glass
Photoresist Analog Transfer Scheme for HEBS-glass Photomasks
Using a HEBS Glass Calibration Plate
Making a HEBS Glass Mask
Exemplary Masks
HEBS Glass Gray Scale Photolithography
Laser Direct Write (LDW) Glass
Applications of CMI Technology
A Short List of Publications on HEBS-Glass and LDW Glass Gray Scale Photomasks
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